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Multi-step ion beam etching of sub-30 nm magnetic tunnel junctions for reducing leakage and MgO barrier damage

Sung-woo Chun, Daehong Kim, Jihun Kwon, Bongho Kim, Seonjun Choi, and Seung-Beck Lee

Journal of Applied Physics, Volume 111, No. 7, pp. 07C722-1~07C722-3, 2012