Ion Beam Etching of sub-30 nm Scale Magnetic Tunnel Junctions for Spin Transfer Torque Magnetic Random Access Memory Application, Sungwoo Chun,Jihun Kwon,Bongho Kim, Daehong Kim, Seonjun Choi and Seung-Beck Lee, Nano Korea Symposium 2011. August 24, 2011, KINTEX, Korea                                                

 

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