Fabrication of 10 nm Line-and-Space Nanoprobes using Multilayer Sidewall Deposition and Chemical-Mechanical Polishing,Seong-Kyu Kang, Byeong-Min Kim, Jihun Kwon, Eunsuk Choi, and Seung-Beck Lee,Nano Korea Symposium 2011, August 24, 2011,KINTEX,Korea

 

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