Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage, Sungwoo Chun, Daehong Kim, Jihun Kwon, Bongho Kim, Seonjun Choi and Seung-Beck Lee, 56th Annual Conference on Magnetism and Magnetic Materials (MMM) 2011 , November 2, 2011, Scottsdale, Arizona, USA

 

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