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Fabrication of on-chip fluidic channels incorporating nanopores using self-aligned double layer resist processing technique

Bongho Kim, Jihun Kwon, Daehong Kim, Sungwoo Chun, Hyungyu Lee and Seung-Beck Lee

Journal of Vacuum Science & Technology B,Volume 30, No. 6, pp. 06F802-1~06F802-4, 2012.