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Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO2 Sputter Deposition

Sung-Min Kang, Bonghyun Park, Il-Sik Nam, Chae-Hyun Lim, Heongkyu Ju and Seung-Beck Lee,

Journal of the Korean Physical Society, Volume 48, 883, 2006